Equipment ETCH Plasma Therm SLR-770ICP

• Status

  For sale

• LUNS Code

  LT20044

• Process

  ETCH

• Wafer Size

  100mm

• Maker

  Plasma Therm

• Model

  SLR-770ICP

• S/N

  PTI-81076

• Vintage

  1998-12-04

• Remark