Equipment ETCH ULVAC NE-5700

• Status

  Sold out

• LUNS Code

  LT20007

• Process

  ETCH

• Wafer Size

  150mm

• Maker

  ULVAC

• Model

  NE-5700

• S/N

  MV06-1204-0

• Vintage

  2007-04

• Remark