R & D


  • Purpose of Establishment

In 2020, LUNS established an institute to build a research center in order to increase the added value of used semiconductor equipment. We are working to develop plasma generating devices used for etching and cleaning process during non-memory semiconductor manufacturing processes.

Profile of Research Director

Semiconductor development

Silicon ingot growing system development

MMO(Mixed Metal Oxide) electrode development

Protection film development

FAB turnkey project managing

Varying experience about equipment De-installation & Relocation

Safe handling and shipping of FAB equipment and parts